AMHS Equipments

Provide site operation/inspection/adjustment of equipment fitted to semiconductor environment with the know-how and 15-year-period wide experience of planning, developing, managing of automated material handling system(AMHS) returning facilities.

Major clients

AMHS equipment to make the return of semiconductor processes smooth, is very important as high constructing/adjusting ability lead the product quality.

  • CLEAN WAY
  • CLEAN STOCKER
  • VEHICLE
  • AZFS
ZIP TOWER